JPH0724658Y2 - 微動機構 - Google Patents

微動機構

Info

Publication number
JPH0724658Y2
JPH0724658Y2 JP4883989U JP4883989U JPH0724658Y2 JP H0724658 Y2 JPH0724658 Y2 JP H0724658Y2 JP 4883989 U JP4883989 U JP 4883989U JP 4883989 U JP4883989 U JP 4883989U JP H0724658 Y2 JPH0724658 Y2 JP H0724658Y2
Authority
JP
Japan
Prior art keywords
guide
electrode
fine movement
facing
movement mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4883989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02139043U (en]
Inventor
広信 園田
正典 末松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP4883989U priority Critical patent/JPH0724658Y2/ja
Publication of JPH02139043U publication Critical patent/JPH02139043U/ja
Application granted granted Critical
Publication of JPH0724658Y2 publication Critical patent/JPH0724658Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play
    • F16C32/0674—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play by means of pre-load on the fluid bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/06—Relieving load on bearings using magnetic means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP4883989U 1989-04-27 1989-04-27 微動機構 Expired - Lifetime JPH0724658Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4883989U JPH0724658Y2 (ja) 1989-04-27 1989-04-27 微動機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4883989U JPH0724658Y2 (ja) 1989-04-27 1989-04-27 微動機構

Publications (2)

Publication Number Publication Date
JPH02139043U JPH02139043U (en]) 1990-11-20
JPH0724658Y2 true JPH0724658Y2 (ja) 1995-06-05

Family

ID=31566008

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4883989U Expired - Lifetime JPH0724658Y2 (ja) 1989-04-27 1989-04-27 微動機構

Country Status (1)

Country Link
JP (1) JPH0724658Y2 (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101009320B1 (ko) * 2006-03-22 2011-01-18 쿄세라 코포레이션 정압 슬라이더, 이것을 구비한 반송 장치 및 처리 장치
JP2013079950A (ja) * 2011-09-20 2013-05-02 Mitsutoyo Corp 精密送り装置および精密移動装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101009320B1 (ko) * 2006-03-22 2011-01-18 쿄세라 코포레이션 정압 슬라이더, 이것을 구비한 반송 장치 및 처리 장치
JP2013079950A (ja) * 2011-09-20 2013-05-02 Mitsutoyo Corp 精密送り装置および精密移動装置

Also Published As

Publication number Publication date
JPH02139043U (en]) 1990-11-20

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